BS ISO 15471:2016 pdf download

BS ISO 15471:2016 pdf download.Surface chemical analysis — Auger electron spectroscopy — Description of selected instrumental performance parameters
1 Scope
This International Standard specifies the requirements for the description of specific aspects of the performance of an Auger electron spectrometer.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 18115-1, Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in
spectroscopy
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 18115-1 apply.
4 Symbols and abbreviated terms
AES Auger electron spectroscopy (also Auger electron spectrometer)
FWHM full width at half maximum
rms root mean square
SAM scanning Auger electron microscope (also scanning Auger electron microscopy)
SEM scanning electron microscope
FL Fermi level
VL vacuum level
NOTE Historically, the kinetic-energy scales of AES instruments have been referred to the VL while XPS or combined AES/XPS instruments have been referred to the FL. Conversion from FL to VL referencing is accomplished by subtracting the spectrometer work function from the electron kinetic energies; an approximate means for doing this, satisfactory for most practical AES and SAM applications, is to subtract 4,5 eV from kinetic energies referred to the FL.
5 Description of selected instrumental performance parameters
5.1 Method of analysis
A short description of the methods used to obtain information from the sample shall be given and the availability (as an option) of other analytical techniques in the system under consideration shall be stated.
5.5.3 Method 2
A sample shall be analysed which is comprised of two materials with their surfaces in the same plane and joined along a common straight edge. A line trace for an Auger electron intensity, characteristic of one of the two materials, measured at 90° to the edge, is used to define spatial resolution. The distance for the Auger electron intensity to change from 20 % to 80 % of the difference in the intensities in the plateau regions away from the edge defines the spatial resolution in the direction of the scan. NOTE 1 If an instrument has a spatial resolution function that can be represented by a Gaussian function, then such an intensity distance distribution is equivalent to 71,5 % of the FWHM of the spatial resolution function of the instrument. NOTE 2 Close to the limit of resolution, astigmatism can be observed and so the spatial resolution might need determination in more than one azimuth.