BS ISO 17973:2016 pdf download

BS ISO 17973:2016 pdf download.Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
1 Scope
This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 18115 (all parts), Surface chemical analysis — Vocabulary
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 18115 apply.
4 Symbols and abbreviated terms
AES Auger electron spectroscopy
a measured energy scaling error
b measured zero offset error, in eV
E corr corrected result for kinetic energy corresponding to given E meas , in eV
E meas measured kinetic energy, in eV
E meas,n measured kinetic energy for peak n (see Table 1), in eV
E ref,n reference values for kinetic energy position of peak n (see Table 1), in eV
FWHM full width at half maximum peak intensity above background, in eV
W FWHM of peak
Δ n offset energy, given by average measured kinetic energy for calibration peak minus refer-ence kinetic energy, in eV, for n = 1, 2, 3, 4 (see Table 1)
5 Outline of method
Calibration of an Auger electron spectrometer using this International Standard is performed by obtaining and preparing copper and gold or aluminium reference foils in order to measure the kinetic energies of selected Auger electron peaks. These reference materials are chosen as they provide one Auger electron peak in the high energy range, one in the middle range and one at low energies. The samples are cleaned and spectra are recorded in the direct mode, if that is available, or in the differential mode if not. The energies of the peaks are compared with reference values to provide an energy scale correction. How this correction is implemented depends on the facilities available with the spectrometer. Because this calibration may alter with time, a procedure is defined to enable the calibration to be established at regular intervals. See Figure 1 for a flowchart showing the general structure of the work and the sequence of procedures.