ISO 19606:2017 pdf download

ISO 19606:2017 pdf download.Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
1 Scope
This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements,RSm, in the range of about 0,04 μm to 2,5 μm.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 4287, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 4288, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Rules and procedures for the assessment of surface texture
ISO 11039, Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
ISO 11952, Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
ISO 18115-2, Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy
ISO 25178-2, Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions and surface texture parameters
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 4287, ISO 4288, ISO 18115-2,
ISO 11039, ISO 11952 and ISO 25178-2 and the following apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— IEC Electropedia: available at http:// www .electropedia .org/
— ISO Online browsing platform: available at http:// www .iso .org/ obp
3.1 evaluation length
ln(X), ln(Y) length of surface profile in the X or Y direction
3.2 probe-tip diameter evaluation standard plate
plate on which needle-shaped spikes are formed
Note 1 to entry: The plate is used to evaluate the probe-tip diameter (3.3).
4 Test environment
Testing shall be carried out only where temperature change, sound noise and mechanical vibration of the floor or walls are small enough to perform the measurements. The following installation environment is recommended:
a) temperature: 18 °C to 25 °C;
b) humidity: 70 % or less;
c) noise level: 60 dB or less;
d) mechanical vibration of the floor or the wall: 1 × 10 −3 m/s 2 (<100 Hz) or less.
5 Roughness measurement specimens
Specimens for roughness measurements are ceramic thin films on a substrate. Any kinds of substrate material can be used, such as metal, glass, polymer, etc. The specimen shall be no larger than the specimen stage of the instrument being used.